JPH01110269U - - Google Patents
Info
- Publication number
- JPH01110269U JPH01110269U JP567188U JP567188U JPH01110269U JP H01110269 U JPH01110269 U JP H01110269U JP 567188 U JP567188 U JP 567188U JP 567188 U JP567188 U JP 567188U JP H01110269 U JPH01110269 U JP H01110269U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- layer
- growing
- vapor phase
- units
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012808 vapor phase Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OEYOHULQRFXULB-UHFFFAOYSA-N arsenic trichloride Chemical compound Cl[As](Cl)Cl OEYOHULQRFXULB-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP567188U JPH01110269U (en]) | 1988-01-20 | 1988-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP567188U JPH01110269U (en]) | 1988-01-20 | 1988-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110269U true JPH01110269U (en]) | 1989-07-25 |
Family
ID=31209250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP567188U Pending JPH01110269U (en]) | 1988-01-20 | 1988-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110269U (en]) |
-
1988
- 1988-01-20 JP JP567188U patent/JPH01110269U/ja active Pending
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